High Temperature Thermal Mass Flow Controllers & Meters 

Highest-purity flow path for challenging high-temperature applications.

Many of today’s advanced electronic device fabrication processes require extremely accurate and highly repeatable measurement and control of expensive ultra-pure gases and liquid precursors.  Brooks Instrument meets those needs with our high temperature metal sealed thermal mass flow meters and controllers. Precise chemistry control is achieved through the combination of ultra-stable, highly accurate measurement sensors, fast precision control valves and powerful digital electronics. Purity of the process chemistry is ensured by our high-integrity (leak tight), ultra-high purity, all-metal wetted flow path, designed to keep outside contaminants like moisture and oxygen from corrupting the process media.

KEY APPLICATIONS

  • Optical fiber manufacturing for high temperature flow meters - MCVD
  • Silicon semiconductor device fabrication processes
    • CVD (precursor delivery in vapor form)
    • Strip (water vapor)
    • Etch (water vapor for passivation)

KEY FEATURES

  • Highest operating temperature (1500C)
  • High accuracy - SP ±1% and repeatability
  • Ultra-high purity construction

 

THÔNG TIN SẢN PHẨM :

Product Series

5850EMH

9861

Models

5850EMH / 5851EMH

C9861/ M9681

Product Type

Mass Flow Controller

Mass Flow Controller

Differentiator

Highest Flow Range

Proven, reliable technology

Highest Flow Accuracy

Highest Operating Temperature

Digital Communication

Flow Range (Full Scale Capacity)

100 slm (N2 equivalent)

10 slm (N2 equivalent)

Seal Material

Metal

Metal

Level of Purity / Surface Finish

—

4 μ inch Ra

Accuracy

1% of FS

1% of SP@ 35 - 100% FS

0.35% of FS @ <35% FS

Repeatability

<±0.25% SP

<±0.15% FS

Response Time

<3 sec to within 2% of SP (per SEMI E17-91)

<1 sec to within 2% of SP (per SEMI E17-91)

Max Pressure

1 MPa (145 psi)

620 kPa (90 psi)

Max Temperature

105oC

150oC

Diagnostic Capability

—

—

Analog Communication

0-5 Vdc

0-5 Vdc

Digital Communication

—

RS485 L-Protocol (via dual RJ11 ports)

 

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