Vapor Delivery Modules VDM300

The Vapor Delivery Module (VDM) from Brooks Instrument is a high-performance, self-contained module for the highly accurate delivery of ultra-high purity deionized (DI) water vapor. It features a power efficient design that enables low temperature, ultra-high purity vapor generation. It utilizes a proven vapor delivery technique and combines it with advanced digital control and integrated diagnostic features in a small, convenient package.

Designed for advanced strip and post metal etch passivation processes, the VDM delivers improved accuracy, higher flow rates, wider control range and lower power consumption compared to flash evaporation systems. Based on proven thermal mass flow measurement techniques, the VDM produces vapor in a non-super-heated vapor state, reducing the aggressive effects of deionized water, for improved reliability and cleaner operation.


  • Silicon semiconductor post-metal etch process
  • Silicon semiconductor metal strip process
  • Ultra-high purity humidification in sub-atmospheric environments


  • Flow range: 3 slpm (DIW vapor)
  • Direct water vapor measurement with superior flow accuracy
  • Connects directly to the house deionized water supply
  • Operates at lower temperatures (non-superheated state)
  • Optimized design for flushing and draining
  • EtherCAT digital communications
  • Brooks Expert Support Tool (BEST) graphical user interface


  • Plasma etch and photoresist strip equipment vapor delivery
  • UHP DI water vapor applications
  • Sub atmospheric process chambers only
  • Product Type : DI Water Vapor Delivery Module
  • Differentiator:
    • High Purity DIW Vapor Delivery
    • Highest Flow Accuracy
    • Compact Design
    • EtherCAT Digital Communications
    • Enhance User Interface
  • Vaporization Method : Vapor Draw
  • Fluid Type: DI Water
  • Max Vapor Capacity: 3000 sccm (DI Water)
  • Max Pressure :200 Torr


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